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  • Application scenarios and characteristics of vacuum resistant stepper motors May 09, 2025
    vacuum resistant stepper motor are specifically designed to operate reliably in vacuum environments (low pressure, oxygen-free, extreme temperatures, etc.). They are essential in the following applications: 1. Semiconductor and Integrated Circuit Manufacturing Applications: Photolithography machines, wafer handling, vacuum deposition, ion implantation equipment. Reason: Semiconductor processes require ultra-high vacuum (e.g., below 10⁻⁶ Pa) to avoid contamination. Standard motors may outgas or release lubricants, while vacuum-compatible motors use specialized materials and sealing.   2. Aerospace and Space Technology Applications: Satellite attitude control, focusing mechanisms for space telescopes, vacuum chamber testing. Reason: Space is an extreme vacuum environment, requiring motors that withstand zero lubrication outgassing, extreme temperatures (-200°C to +150°C), and radiation.   3. Vacuum Coating and Surface Treatment Applications: PVD (Physical Vapor Deposition), CVD (Chemical Vapor Deposition) workpiece rotation or transport. Reason: Processes demand vacuums of 10⁻³ to 10⁻⁷ Pa, necessitating motors that are dust-proof, low-outgassing, and non-magnetic.   4. Medical and Scientific Instruments Applications: Electron microscope sample stages, particle accelerator components, cryo-electron microscopy. Reason: High-precision positioning requires motors that operate without vibration or gas release in vacuum.   5. High-Energy Physics Experiments Applications: Synchrotron radiation devices, motion control in nuclear fusion reactors (e.g., tokamaks). Reason: Extreme conditions (ultra-high vacuum up to 10⁻⁹ Pa, strong magnetic fields) demand non-magnetic materials (e.g., stainless steel housing) and specialized lubrication.   6. Food and Pharmaceutical Vacuum Packaging Applications: Conveyor systems in automated vacuum packaging machines. Reason: Although vacuum levels are lower (1–0.1 Pa), motors must resist corrosion (e.g., food-grade lubricants).   Key Features of Vacuum-Compatible Motors: Materials: Low-outgassing (e.g., ceramic bearings, fluoropolymer seals). Lubrication: Solid lubricants (molybdenum disulfide) or vacuum-rated greases. Thermal Management: Designed for conduction cooling (no air convection). Certifications: Compliant with standards like ISO 21358-1 for vacuum equipment. Risks of Using Standard Motors in Vacuum Lubricant evaporation → Contaminates vacuum chamber. Material outgassing → Degrades vacuum quality. Overheating or seal failure → Motor damage. When selecting a motor, consider vacuum level (low, high, ultra-high), temperature range, and motion precision requirements.Ctrl-Motor has been engaged in the R&D, production and sales of vacuum motors, high and low temperature motors-related drivers, stepper motors, servo motors, and reducers for 12 years. The high and low temperature motors can be adapted to any extreme conditions from -196℃ to 300℃, and the vacuum degree can reach 10-7pa, we can provide 10^7Gy radiation protection and salt spray protection products.   
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