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Application scenarios and characteristics of vacuum resistant stepper motors

Application scenarios and characteristics of vacuum resistant stepper motors

May 09, 2025

vacuum resistant stepper motor are specifically designed to operate reliably in vacuum environments (low pressure, oxygen-free, extreme temperatures, etc.). They are essential in the following applications:

1. Semiconductor and Integrated Circuit Manufacturing

Applications: Photolithography machines, wafer handling, vacuum deposition, ion implantation equipment.

Reason: Semiconductor processes require ultra-high vacuum (e.g., below 10⁻⁶ Pa) to avoid contamination. Standard motors may outgas or release lubricants, while vacuum-compatible motors use specialized materials and sealing.

 

2. Aerospace and Space Technology

Applications: Satellite attitude control, focusing mechanisms for space telescopes, vacuum chamber testing.

Reason: Space is an extreme vacuum environment, requiring motors that withstand zero lubrication outgassing, extreme temperatures (-200°C to +150°C), and radiation.

 

3. Vacuum Coating and Surface Treatment

Applications: PVD (Physical Vapor Deposition), CVD (Chemical Vapor Deposition) workpiece rotation or transport.

Reason: Processes demand vacuums of 10⁻³ to 10⁻⁷ Pa, necessitating motors that are dust-proof, low-outgassing, and non-magnetic.

 

4. Medical and Scientific Instruments

Applications: Electron microscope sample stages, particle accelerator components, cryo-electron microscopy.

Reason: High-precision positioning requires motors that operate without vibration or gas release in vacuum.

 

5. High-Energy Physics Experiments

Applications: Synchrotron radiation devices, motion control in nuclear fusion reactors (e.g., tokamaks).

Reason: Extreme conditions (ultra-high vacuum up to 10⁻⁹ Pa, strong magnetic fields) demand non-magnetic materials (e.g., stainless steel housing) and specialized lubrication.

 

6. Food and Pharmaceutical Vacuum Packaging

Applications: Conveyor systems in automated vacuum packaging machines.

Reason: Although vacuum levels are lower (1–0.1 Pa), motors must resist corrosion (e.g., food-grade lubricants).

 

Key Features of Vacuum-Compatible Motors:

Materials: Low-outgassing (e.g., ceramic bearings, fluoropolymer seals).

Lubrication: Solid lubricants (molybdenum disulfide) or vacuum-rated greases.

Thermal Management: Designed for conduction cooling (no air convection).

Certifications: Compliant with standards like ISO 21358-1 for vacuum equipment.

Risks of Using Standard Motors in Vacuum

Lubricant evaporation → Contaminates vacuum chamber.

Material outgassing → Degrades vacuum quality.

Overheating or seal failure → Motor damage.

When selecting a motor, consider vacuum level (low, high, ultra-high), temperature range, and motion precision requirements.Ctrl-Motor has been engaged in the R&D, production and sales of vacuum motors, high and low temperature motors-related drivers, stepper motors, servo motors, and reducers for 12 years. The high and low temperature motors can be adapted to any extreme conditions from -196℃ to 300℃, and the vacuum degree can reach 10-7pa, we can provide 10^7Gy radiation protection and salt spray protection products. 

 

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